Stress Measurement on TiN/TaN Multilayers coated by Magnetron Sputtering with Bias on Silicon Substrate (100). Scién. Inge. [Internet]. 2025 Jul. 28 [cited 2026 Jul. 18];21(2):81-9. Available from: https://revistas.unitru.edu.pe/index.php/PGM/article/view/6660