Stress Measurement on TiN/TaN Multilayers coated by Magnetron Sputtering with Bias on Silicon Substrate (100). SCIÉNDO INGENIUM, [S. l.], v. 21, n. 2, p. 81–89, 2025. DOI: 10.17268/scien.inge.2025.02.06. Disponível em: https://revistas.unitru.edu.pe/index.php/PGM/article/view/6660. Acesso em: 19 jul. 2026.